Line-edge-roughness characterization of photomask patterns and lithography-printed patterns Academic Article

authors

• Lee, Chabum

published proceedings

• Precision Engineering

author list (cited authors)

• Wang, Z., Lin, P., Nguyen, P., Wang, J., & Lee, C.

complete list of authors

• Wang, Zhikun||Lin, Pengfei||Nguyen, Phuc||Wang, Jingyan||Lee, ChaBum

publication date

• June 2024

publisher

• Elsevier  Publisher

published in

• Precision Engineering  Journal

keywords

• 40 Engineering
• 4014 Manufacturing Engineering

Digital Object Identifier (DOI)

• 10.1016/j.precisioneng.2024.02.006

start page

• 235

end page

• 240

volume

• 88

URL

• http://dx.doi.org/10.1016/j.precisioneng.2024.02.006