Treatment of organic wastewater discharged from semiconductor manufacturing process by ultraviolet/hydrogen peroxide and biodegradation Academic Article

authors

• Den, Walter

published proceedings

• IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

altmetric score

• 3

author list (cited authors)

• Den, W., Ko, F. H., & Huang, T. Y.

citation count

• 26

complete list of authors

• Den, W||Ko, FH||Huang, TY

publication date

• November 2002

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions on Semiconductor Manufacturing  Journal

keywords

• Advanced Oxidation Processes
• Biodegradation
• Microelectronics
• Organic Wastewater
• Photochemical Intermediates
• Ultraviolet Oxidation

Digital Object Identifier (DOI)

• 10.1109/TSM.2002.804903

start page

• 540

end page

• 551

volume

• 15

issue

• 4

URL

• http://dx.doi.org/10.1109/tsm.2002.804903