Review-Airborne Molecular Contamination: Recent Developments in the Understanding and Minimization for Advanced Semiconductor Device Manufacturing Academic Article

authors

• Den, Walter

published proceedings

• ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY

altmetric score

• 7

author list (cited authors)

• Den, W., Hu, S., Garza, C. M., & Zargar, O. A.

citation count

• 15

complete list of authors

• Den, Walter||Hu, Shih-Cheng||Garza, Cesar M||Zargar, Omid Ali

publication date

• January 2020

publisher

• The Electrochemical Society  Publisher

published in

• ECS Journal of Solid State Science and Technology  Journal

keywords

• Airborne Molecules
• Cross Contamination
• Device Yield
• Moisture Control
• Wafer Processing

Digital Object Identifier (DOI)

• 10.1149/2162-8777/aba080

start page

• 064003

end page

• 064003

volume

• 9

issue

• 6

URL

• http://dx.doi.org/10.1149/2162-8777/aba080