Nanoscale Direct Patterning With a Combination of Micro Zone Plates and Pulsed Light Sources Conference Paper uri icon


  • Micro Fresnel zone plate has showed a potential in the recent few years for precise nanoscale detection and fabrication. In this study, nano-patterns have been generated on photoresist and copper films through coupling a micro Fresnel zone plate with pulsed light sources. To understand the near field and far field optical energy transport from the zone plate to the target along with the resulting thermal energy transport, a series of experimental measurement of the size and shape of nano-patterns generated on targets under different experimental conditions was conducted. In addition, a theoretical optical analysis for the light focusing in the near field range to the target along with the heating process of the target is established.

name of conference

  • ASME 2010 International Mechanical Engineering Congress and Exposition

published proceedings

  • Volume 7: Fluid Flow, Heat Transfer and Thermal Systems, Parts A and B

author list (cited authors)

  • Sundaram, V. M., & Wen, S.

citation count

  • 0

complete list of authors

  • Sundaram, Vijay M||Wen, Sy-Bor

publication date

  • January 2010