Nanoscale Direct Patterning With a Combination of Micro Zone Plates and Pulsed Light Sources
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Micro Fresnel zone plate has showed a potential in the recent few years for precise nanoscale detection and fabrication. In this study, nano-patterns have been generated on photoresist and copper films through coupling a micro Fresnel zone plate with pulsed light sources. To understand the near field and far field optical energy transport from the zone plate to the target along with the resulting thermal energy transport, a series of experimental measurement of the size and shape of nano-patterns generated on targets under different experimental conditions was conducted. In addition, a theoretical optical analysis for the light focusing in the near field range to the target along with the heating process of the target is established. Copyright © 2010 by ASME.
author list (cited authors)
Sundaram, V. M., & Wen, S.