The Role of Gas‐Phase Reactions in Modeling of the Forced‐Flow Chemical Vapor Infiltration Process
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An analytical model is presented, which includes the effects of both gas–phase and surface reactions, and the pressure changes due to the chemical reactions in the forced–flow chemical vapor infiltration (FCVI) process. For the FCVI process controlled by the gas–phase reactions, improvements of the process by using the forced–flow are limited. However, for the FCVI process controlled by the surface reactions, the process can be improved with the use of the forced–flow technique. For the surface–reaction–controlled FCVI process, the degree of improvement increases with increasing permeability of the composite preform. In other words, advantages due to the forced–flow are higher at the initial stage of the process when the porosity of the composite preform is high. © 1993, The Electrochemical Society, Inc. All rights reserved.
author list (cited authors)
Tsai, C. Y., Desu, S. B., Chiu, C. C., & Reddy, J. N.