Preliminary study of photomask pattern inspection by beam-shaped knife-edge interferometry Academic Article uri icon

published proceedings

  • PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

author list (cited authors)

  • Wang, Z., Lin, P., & Lee, C.

complete list of authors

  • Wang, Zhikun||Lin, Pengfei||Lee, ChaBum

publication date

  • January 1, 2022 11:11 AM