Preliminary study of photomask pattern inspection by beam-shaped knife-edge interferometry
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Overview
published proceedings
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PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
author list (cited authors)
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Wang, Z., Lin, P., & Lee, C.
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Wang, Zhikun||Lin, Pengfei||Lee, ChaBum
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Research
keywords
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Critical Dimension
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Interferogram Analysis
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Knife-edge Interferometry
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Line-edge Quality
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Photomask Inspection
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URL
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http://dx.doi.org/10.1016/j.precisioneng.2022.05.011