Statistical Models of Overdispersed Spatial Defects for Predicting the Yield of Integrated Circuits

authors

• Kuo, Yue

published proceedings

• IEEE TRANSACTIONS ON RELIABILITY

author list (cited authors)

• Yuan, T., Bae, S. J., & Kuo, Y.

citation count

• 2

complete list of authors

• Yuan, Tao||Bae, Suk Joo||Kuo, Yue

publication date

• June 2020

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions on Reliability  Journal

keywords

• Clustered Defects
• Dispersion
• Generalized Poisson (gp) Distribution
• Hurdle-at-zero (hz) Models
• Integrated Circuit Modeling
• Manufacturing
• Maximum Likelihood Estimation
• Prediction Of Ic Yield
• Predictive Models
• Semiconductor Device Modeling
• Zero-inflated Models

Digital Object Identifier (DOI)

• 10.1109/TR.2019.2943925

start page

• 510

end page

• 521

volume

• 69

issue

• 2

URL

• http://dx.doi.org/10.1109/tr.2019.2943925