Pressure-fed mechanism to compensate for motions and dynamic characteristics of compliant nanopositioning stages
Academic Article
-
- Overview
-
- Research
-
- Identity
-
- Additional Document Info
-
- Other
-
- View All
-
Overview
published proceedings
-
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
author list (cited authors)
-
Chun, H., Han, J., Wright, L., Elwany, A., Villarraga-Gomez, H., & Lee, C.
citation count
complete list of authors
-
Chun, Heebum||Han, JaeMin||Wright, Lesley||Elwany, Alaa||Villarraga-Gomez, Herminso||Lee, ChaBum
publication date
publisher
published in
Research
keywords
-
Additive Manufacturing
-
Compensation
-
Dynamic System Characteristics
-
Motion Error
-
Pressure-fed Mechanisms
Identity
Digital Object Identifier (DOI)
Additional Document Info
start page
end page
volume
Other
URL
-
http://dx.doi.org/10.1016/j.precisioneng.2020.01.002
