Optimization of ultrafast laser parameters for 3D micromachining of fused silica Academic Article

authors

• Madsen, Christi

published proceedings

• OPTICS AND LASER TECHNOLOGY

author list (cited authors)

• Dogan, Y., & Madsen, C. K.

citation count

• 12

complete list of authors

• Dogan, Yusuf||Madsen, Christi K

publication date

• January 2020

publisher

• Elsevier  Publisher

published in

• Optics and Laser Technology  Journal

keywords

• 3d Microfabrication
• Chemical Etching
• Direct Writing
• Roughness
• Selectivity
• Ultrafast Laser

Digital Object Identifier (DOI)

• 10.1016/j.optlastec.2019.105933

start page

• 105933

end page

• 105933

volume

• 123