HIGH HEAT FLUX EVAPORATIVE NANOPOROUS SILICON MEMBRANE DEVICE FOR ADVANCED THERMAL MANAGEMENT Conference Paper uri icon

abstract

  • 2016 TRF We report the design, fabrication and characterization of a novel nanoporous membrane evaporation device to address ultrahigh heat fluxes in advanced electronics. Our design leverages high capillary pressures (~500 kPa) generated by a liquid wetting 130 nm diameter pores of an ultra-thin (600 nm) silicon membrane, suspended over a microfluidic supply network. The device was microfabricated in silicon and tested using methanol as the working fluid. We demonstrated a heat dissipation over 600 W/cm2 with a heat transfer coefficient more than 15 W/cm2K, which suggests this approach is promising as a high flux thermal management strategy.

name of conference

  • 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest

published proceedings

  • 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest

author list (cited authors)

  • Hanks, D. F., Sircar, J., Lu, Z., Antao, D. S., Bagnall, K. R., Barabadi, B., Salamon, T. R., & Wang, E. N.

citation count

  • 0

complete list of authors

  • Hanks, DF||Sircar, J||Lu, Z||Antao, DS||Bagnall, KR||Barabadi, B||Salamon, TR||Wang, EN

publication date

  • January 1, 2016 11:11 AM