Plasma-Based Chemical Modification of Epitaxial Graphene Conference Paper uri icon

abstract

  • In this work, the chemical modification of epitaxial graphene on SiC using electron beam generated plasmas produced in mixtures of argon and oxygen is demonstrated. The treatment imparts oxygen functional groups on the surface with concentrations ranging up to about 12 at.%, depending on treatment parameters. Surface characterization shows the incorporation of oxygen leads to a disruption of π-bonds, and an altering of bulk electrical properties. © (2012) Trans Tech Publications.

author list (cited authors)

  • Walton, S. G., Hernández, S. C., Baraket, M., Wheeler, V. D., Nyakiti, L. O., Myers-Ward, R. L., Eddy, C. R., & Gaskill, D. K.

citation count

  • 7

publication date

  • May 2012