Plasma-Based Chemical Modification of Epitaxial Graphene Conference Paper uri icon


  • In this work, the treatment of epitaxial graphene on SiC using electron beam generated plasmas produced in mixtures of argon and oxygen is demonstrated. The treatment imparts oxygen functional groups on the surface with concentrations ranging up to about 12 at.%, depending on treatment parameters. Surface characterization of the functionalized graphene shows incorporation of oxygen to the lattice by disruption of -bonds, and an altering of bulk electrical properties.

published proceedings

  • Materials Science Forum

author list (cited authors)

  • Walton, S. G., Hernndez, S. C., Baraket, M., Wheeler, V. D., Nyakiti, L. O., Myers-Ward, R. L., Eddy, C. R., & Gaskill, D. K.

publication date

  • January 1, 2012 11:11 AM