Plasma-based chemical modification of epitaxial graphene Conference Paper

abstract

• In this work, the treatment of epitaxial graphene on SiC using electron beam generated plasmas produced in mixtures of argon and oxygen is demonstrated. The treatment imparts oxygen functional groups on the surface with concentrations ranging up to about 12 at.%, depending on treatment parameters. Surface characterization of the functionalized graphene shows incorporation of oxygen to the lattice by disruption of -bonds, and an altering of bulk electrical properties.

authors

• Nyakiti, Luke

published proceedings

• SILICON CARBIDE AND RELATED MATERIALS 2011, PTS 1 AND 2

author list (cited authors)

• Walton, S. G., Hernandez, S. C., Baraket, M., Wheeler, V. D., Nyakiti, L. O., Myers-Ward, R. L., Eddy, C., & Gaskill, D. K.

citation count

• 7

complete list of authors

• Walton, SG||Hernandez, SC||Baraket, M||Wheeler, VD||Nyakiti, LO||Myers-Ward, RL||Eddy, CR Jr||Gaskill, DK

publication date

• June 2012

publisher

• Trans Tech Publications  Publisher

published in

• Materials Science Forum  Journal

keywords

• Epitaxial Graphene
• Functionalization
• Oxygen
• Plasma

Digital Object Identifier (DOI)

• 10.4028/www.scientific.net/MSF.717-720.657

International Standard Book Number (ISBN) 13

• 978-3-03785-419-8

start page

• 657

end page

• +

volume

• 717-720

URL

• http://dx.doi.org/10.4028/www.scientific.net/msf.717-720.657