Precision Cutting Tool Wear Monitoring Method by Knife-Edge Diffraction Interferometry Conference Paper uri icon


  • Copyright © 2018 ASME. This paper presents a non-contact, convenient, efficient cutting tool wear monitoring technique of dicing wheel based on a knife-edge diffraction interferometry. Dicing is a standard technology for fabricating components of microelectromechanical systems, and the wear of dicing wheels may influence the components' quality with respect to cuttingsurface quality and subsurface damage. Based on the edge diffraction principle that utilizes interference of transmitted wave and a diffracted wave at the wheel end, the diffraction patterns according to dicing wheel conditions were scanned, and cross-correlation was used to extract attrition and abrasive wear from the measured diffraction patterns. Attrition and abrasive wear were related with lag and similarity coefficients of cross-correlation, respectively. This measurement technique can be used for in-process monitoring of wheel conditions or wheel radius compensation and can be included in dicing parameter optimization process.

author list (cited authors)

  • Lee, C.

citation count

  • 1

publication date

  • June 2018