Fabrication of Phase Reflection Sawtooth Gratings Optimized by Scalar and Vector Way by Using Diamond Cutting Conference Paper uri icon

abstract

  • This paper presents optimization of phase reflection sawtooth gratings with a period of 2.0 m and a depth of 0.2 m based on the Fourier transformation (FT) and the rigorous coupled wave analysis (RCWA). And its fabrication on oxygen free Cu and electroless Ni-coated surfaces by using diamond cutting in a shaping process whose toolpath is interfered to provide smaller period. The diffraction efficiencies were estimated 100% for FT, 83.0% and 79.0% for TE and TM polarization of the incident light at a depth of 0.2 m. It was found that electroless Ni-coated surface had better performance in terms of machining and optical functionality. From optical testing, the diffraction efficiencies were measured 84.0% and 84.4% for TE and TM polarization, respectively.

name of conference

  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems

published proceedings

  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems

author list (cited authors)

  • Lee, C., Kuriyagawa, T., Kim, T., & Lee, S.

citation count

  • 0

complete list of authors

  • Lee, ChaBum||Kuriyagawa, T||Kim, TaeJun||Lee, SunKyu

publication date

  • January 2008