New evidence for a pressure-induced phase transformation during the indentation of silicon Academic Article uri icon


  • Scanning electron micrographs of indents in (111) silicon reveal that a thin layer of material immediately adjacent to the indenter is plastically extruded. The fact that the material can be deformed in this way indicates that it has metallic-like mechanical properties. This is presented as new evidence that a pressure-induced phase transformation to the metallic state occurs during the indentation of silicon.

published proceedings

  • Journal of Materials Research

author list (cited authors)

  • Pharr, G. M., Oliver, W. C., & Harding, D. S.

citation count

  • 213

complete list of authors

  • Pharr, GM||Oliver, WC||Harding, DS

publication date

  • June 1991