Effects of focused ion beam milling on the compressive behavior of directionally solidified micropillars and the nanoindentation response of an electropolished surface Academic Article uri icon


  • Focused ion beam (FIB) milling is the typical method used to fabricate micropillars to study small-scale plasticity and size effects in uniaxial compression. However, FIB milling can introduce defects into the milled pillars. To investigate the effects of FIB damage on mechanical behavior, we tested Mo-alloy micropillars that were FIB milled following directional solidification, and compared their compressive response to pillars that were not FIB milled. We also FIB milled at glancing incidence a Mo-alloy single-crystal surface, and compared its nanoindentation response to an electropolished surface of the same crystal. Implications for the interpretation of data obtained from FIB-milled micropillars are discussed. 2008 Acta Materialia Inc.

published proceedings

  • Acta Materialia

author list (cited authors)

  • Shim, S., Bei, H., Miller, M. K., Pharr, G. M., & George, E. P.

citation count

  • 182

complete list of authors

  • Shim, S||Bei, H||Miller, MK||Pharr, GM||George, EP

publication date

  • January 2009