An improved relation for the effective elastic compliance of a film/substrate system during indentation by a flat cylindrical punch

abstract

• Measurement of the mechanical properties of thin films on substrates by load and depth sensing indentation methods such as nanoindentation often requires accurate descriptions for the effective elastic compliance of the film/substrate system. Here, a simple modification of the commonly used solution derived by Gao et al. [H. Gao, C.H. Chiu, J. Lee, Int. J. Solids Struct. (1992) 2471] is presented, that significantly improves its accuracy and range of applicability, as demonstrated by comparison with finite element simulations. 2006 Acta Materialia Inc.

authors

• Pharr, George

published proceedings

• Scripta Materialia

author list (cited authors)

• Xu, H., & Pharr, G. M.

citation count

• 68

complete list of authors

• Xu, Haitao||Pharr, GM

publication date

• August 2006

publisher

• Elsevier  Publisher

published in

• Scripta Materialia  Journal

Digital Object Identifier (DOI)

• 10.1016/j.scriptamat.2006.04.037

start page

• 315

end page

• 318

volume

• 55

issue

• 4

URL

• http://dx.doi.org/10.1016/j.scriptamat.2006.04.037