New performance bounds for semiconductor manufacturing plants: batch tools and setups Conference Paper

abstract

• The state space approach to obtaining performance bounds via the average cost inequality allows for the incorporation of model elements such as batch tools and setup modes. We demonstrate with an example how one may construct linear programs to obtain performance bounds for queueing network models of semi-conductor manufacturing plants.

name of conference

• Proceedings of the 38th IEEE Conference on Decision and Control (Cat. No.99CH36304)

authors

• Kumar, Panganamala

published proceedings

• Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference

author list (cited authors)

• Morrison, J. R., & Kumar, P. R.

citation count

• 0

complete list of authors

• Morrison, JR||Kumar, PR

publication date

• January 1999

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• Proceedings of the ... IEEE Conference on Decision & Control / IEEE Control Systems Society. IEEE Conference on Decision & Control  Journal

Digital Object Identifier (DOI)

• 10.1109/cdc.1999.830140

start page

• 1363-1367 vol.2

end page

• 1367

volume

• 2

URL

• http://dx.doi.org/10.1109/cdc.1999.830140