Contamination control using production test data Conference Paper

abstract

• This paper presents a methodology to identify suspect process steps during ramp and maturity of an IC fabrication line by utilizing the production functional testing results and to generate a defect Pareto to prioritize defect contamination control.

authors

• Walker, Duncan

published proceedings

• Proceedings of the IEEE/CPMT International Electronic Manufacturing Technology (IEMT) Symposium

author list (cited authors)

• Kwon, Y. J., & Walker, D.

complete list of authors

• Kwon, YJ||Walker, DMH

publication date

• December 1995

start page

• 70

end page

• 76