Contamination control using production test data Conference Paper uri icon


  • This paper presents a methodology to identify suspect process steps during ramp and maturity of an IC fabrication line by utilizing the production functional testing results and to generate a defect Pareto to prioritize defect contamination control.

published proceedings

  • Proceedings of the IEEE/CPMT International Electronic Manufacturing Technology (IEMT) Symposium

author list (cited authors)

  • Kwon, Y. J., & Walker, D.

complete list of authors

  • Kwon, YJ||Walker, DMH

publication date

  • December 1995