RUTHERFORD ION BACKSCATTERING STUDIES OF ANION DOPED ANODIC FILMS.
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abstract
Anodic films, including alumina, grown in the presence of various metal oxyanions have been found to have a layered structure with the 'anion' located in discrete layers in the oxide film. Quantitative RBS has been used to examine the films. RBS reveals that the anion rich layers are deficient in aluminum cations. The extent of this deficiency is a function of temperature. Although the mechanism of periodic anion incorporation has yet to be determined, several models are discussed in the context of presently available data.