Three Dimensional PDMA Assembly: Design, Process, and Applications Conference Paper

abstract

• This paper discusses a recent three-dimensional assembly process called the Plastic Deformation Magnetic Assembly (PDMA) method. The PDMA method allows three dimensional micromechanical structures to be realized efficiently using surface micromachining and wafer-scale, post-sacrificial-release assembly. We will discuss the principle of the PDMA method, along with the design methodology. The PDMA process has been used for a number of applications, including vertical micro RF inductors, micromachined hot wire anemometers, artificial lateral line sensors, and two dimensional neuron probes. The process for these applications will be discussed to illustrate the usefulness of the PDMA process.

name of conference

• Microelectromechanical Systems

authors

• Zou, Jun

published proceedings

• Microelectromechanical Systems

author list (cited authors)

• Liu, C., Chen, J., Zou, J., & Fan, Z.

citation count

• 0

complete list of authors

• Liu, C||Chen, J||Zou, J||Fan, Z

publication date

• January 2002

publisher

• ASME International  Publisher

Digital Object Identifier (DOI)

• 10.1115/imece2002-33287

International Standard Book Number (ISBN) 10

• 0791836428

International Standard Book Number (ISBN) 13

• 9780791836422

start page

• 55

end page

• 62

URL

• http://dx.doi.org/10.1115/imece2002-33287