GasSensing Properties of Nanocrystalline WO3 Films Made by Advanced Reactive Gas Deposition Academic Article uri icon


  • Nanocrystalline WO3 films were produced by advanced reactive gas deposition onto alumina substrates. The as-deposited films had a tetragonal crystal structure and a mean grain size of around 6 nm, as found by X-ray diffraction and electron microscopy. Sintering at a temperature S > 770 K yielded monoclinic films. We investigated the gas-sensing properties of films sintered up to 870 K. After an initial "activation" at s = 750 K, the nanocrystalline WO3 films showed excellent gas-sensing properties, even at room temperature, on exposure to low concentrations of H2S in air. As little as 10 ppm of H2S made the conductance increase by a factor of about 103 within 10 min. The initial properties could be restored by heating the films to 530 K for 1 min.

published proceedings

  • Journal of the American Ceramic Society

author list (cited authors)

  • Solis, J. L., Hoel, A., Kish, L. B., Granqvist, C. G., Saukko, S., & Lantto, V.

citation count

  • 58

complete list of authors

  • Solis, Jose L||Hoel, Anders||Kish, Laszlo B||Granqvist, Claes G||Saukko, Sami||Lantto, Vilho

publication date

  • July 2001