Determination of oscillator strength of C–F vibrations in fluorinated amorphous-carbon films by infrared spectroscopy
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Fluorinated amorphous-carbon (a-CFx) films deposited by plasma-enhanced chemical-vapor deposition were investigated by Fourier transform infrared transmission spectroscopy and Rutherford backscattering. The proportionality constant between the fluorine concentration and the integrated absorption of C-F vibration modes is 3.52±0.3×1019cm-2, and is constant within experimental uncertainty over a wide range of processing conditions. It is shown that the fluorine content can be accurately determined from the infrared absorption spectrum of a-CFx films. © 2001 American Institute of Physics.
author list (cited authors)
Wang, X., Harris, H., Temkin, H., Gangopadhyay, S., Strathman, M. D., & West, M.