Determination of oscillator strength of CF vibrations in fluorinated amorphous-carbon films by infrared spectroscopy

abstract

• Fluorinated amorphous-carbon (a-CFx) films deposited by plasma-enhanced chemical-vapor deposition were investigated by Fourier transform infrared transmission spectroscopy and Rutherford backscattering. The proportionality constant between the fluorine concentration and the integrated absorption of C-F vibration modes is 3.520.31019cm-2, and is constant within experimental uncertainty over a wide range of processing conditions. It is shown that the fluorine content can be accurately determined from the infrared absorption spectrum of a-CFx films. 2001 American Institute of Physics.

authors

• Harris, Rusty

published proceedings

• Applied Physics Letters

author list (cited authors)

• Wang, X., Harris, H., Temkin, H., Gangopadhyay, S., Strathman, M. D., & West, M.

citation count

• 10

complete list of authors

• Wang, X||Harris, H||Temkin, H||Gangopadhyay, S||Strathman, MD||West, M

publication date

• May 2001

publisher

• AIP Publishing  Publisher

published in

• Applied Physics Letters  Journal

Digital Object Identifier (DOI)

• 10.1063/1.1371970

start page

• 3079

end page

• 3081

volume

• 78

issue

• 20

URL

• http://dx.doi.org/10.1063/1.1371970