Structural properties of fluorinated amorphous carbon films Academic Article uri icon

abstract

  • Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm-1 were resolved into ten peaks, which were assigned to various carbon-fluorine and carbon-carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp2) concentration is demonstrated. © 2000 American Institute of Physics.

author list (cited authors)

  • Wang, X., Harris, H. R., Bouldin, K., Temkin, H., Gangopadhyay, S., Strathman, M. D., & West, M.

citation count

  • 51

publication date

  • January 2000