Structural properties of fluorinated amorphous carbon films Academic Article

abstract

• Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm-1 were resolved into ten peaks, which were assigned to various carbon-fluorine and carbon-carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp2) concentration is demonstrated. 2000 American Institute of Physics.

authors

• Harris, Rusty

published proceedings

• Journal of Applied Physics

author list (cited authors)

• Wang, X., Harris, H. R., Bouldin, K., Temkin, H., Gangopadhyay, S., Strathman, M. D., & West, M.

citation count

• 56

complete list of authors

• Wang, X||Harris, HR||Bouldin, K||Temkin, H||Gangopadhyay, S||Strathman, MD||West, M

publication date

• January 2000

publisher

• AIP Publishing  Publisher

published in

• Journal of Applied Physics  Journal

Digital Object Identifier (DOI)

• 10.1063/1.371910

start page

• 621

end page

• 623

volume

• 87

issue

• 1

URL

• http://dx.doi.org/10.1063/1.371910