Development of Cavity Ring-down Ellipsometry with spectral and submicrosecond time resolution Conference Paper

abstract

• Cavity-enhanced ellipsometry, using nanosecond pulsed lasers and without moving parts, is demonstrated to have submicrosecond time resolution. The ellipsometric phase angles are measured from the Fourier transform of the cavity ring-down experimental signals, with a sensitivity 0.01 degrees. The technique is applied to highly reflective surfaces, including total internal reflection, where the samples are placed within the evanescent wave. The technique can be generalized to broadband sources, such as from supercontinuum generation, allowing spectral resolution of thin films and monolayer samples. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

name of conference

• Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V

authors

• Tzortzakis, Stylianos

published proceedings

• INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS V

author list (cited authors)

• Papadakis, V., Everest, M. A., Stamataki, K., Tzortzakis, S., Loppinet, B., & Rakitzis, T. P.

citation count

• 3

complete list of authors

• Papadakis, Vassilis||Everest, Michael A||Stamataki, Katerina||Tzortzakis, Stelios||Loppinet, Benoit||Rakitzis, T Peter

editor list (cited editors)

• Postek, M. T.

publication date

• September 2011

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Cavity Ring Down
• Ellipsometry
• Evanescent Wave

Digital Object Identifier (DOI)

• 10.1117/12.903053

International Standard Book Number (ISBN) 13

• 9780819487155

start page

• 81050l-81050l-9

volume

• 8105

URL

• http://dx.doi.org/10.1117/12.903053