Development of Cavity Ring-down Ellipsometry with spectral and submicrosecond time resolution
Additional Document Info
Cavity-enhanced ellipsometry, using nanosecond pulsed lasers and without moving parts, is demonstrated to have submicrosecond time resolution. The ellipsometric phase angles are measured from the Fourier transform of the cavity ring-down experimental signals, with a sensitivity 0.01 degrees. The technique is applied to highly reflective surfaces, including total internal reflection, where the samples are placed within the evanescent wave. The technique can be generalized to broadband sources, such as from supercontinuum generation, allowing spectral resolution of thin films and monolayer samples. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
name of conference
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V