Band offset measurements of the GaN/dielectric interfaces Academic Article uri icon

abstract

  • X-ray and ultra violet photoelectron spectroscopy are used to observe the interface electronic states at the GaN (0001) and high-κ dielectric interfaces. The GaN is aqueous HCl cleaned prior to atomic layer deposition of Al 2O 3 and HfO 2, then followed by a post deposition anneal. The GaN/HfO 2 and GaN/Al 2O 3 interfaces exhibited dipoles of 1.6 eV and 0.4 eV, respectively. It is found that the formation of an interfacial layer at the GaN/HfO 2 interface is the primary cause of the larger dipole. © 2012 American Institute of Physics.

author list (cited authors)

  • Coan, M. R., Woo, J. H., Johnson, D., Gatabi, I. R., & Harris, H. R.

citation count

  • 29

publication date

  • July 2012