Plasma processing in the fabrication of amorphous silicon thin-film-transistor arrays Academic Article uri icon

published proceedings

  • IBM Journal of Research and Development

altmetric score

  • 3

author list (cited authors)

  • Kuo, Y., Okajima, K., & Takeichi, M.

citation count

  • 18

complete list of authors

  • Kuo, Y||Okajima, K||Takeichi, M

publication date

  • January 1999


  • IBM  Publisher