Papers on plasma processing - Preface Academic Article

authors

• Kuo, Yue

published proceedings

• IBM JOURNAL OF RESEARCH AND DEVELOPMENT

author list (cited authors)

• Kuo, Y.

citation count

• 3

complete list of authors

• Kuo, Y

publication date

• January 1999

publisher

• IBM  Publisher

published in

• IBM Journal of Research and Development  Journal

Digital Object Identifier (DOI)

• 10.1147/rd.431.0003

start page

• 3

end page

• 4

volume

• 43

issue

• 1-2

URL

• http%3A%2F%2Fdx.doi.org%2F10.1147%2Frd.431.0003