Thin-film transistor and ultra-large scale integrated circuit: Competition or collaboration Academic Article

abstract

• Thin-film transistor (TFT) and ultra-large scale integrated circuit (ULSIC) have been compared and discussed with respect to the development history, technology trends, and applications. Detailed issues on materials, processes, and devices in the large-area TFT array fabrication and nano-size metal-oxide-semiconductor field effect transistors (MOSFETs) composed ULSIC on large wafers were also examined. The TFT fabrication processes were originally derived from ULSIC. However, there are many unique large-area processes and theories developed during the study of the TFT array fabrication, which can greatly benefit the future large wafer ULSIC production process. Although their future applications will be in different areas, there are opportunities that TFTs can be integrated into ULSIC products to enhance the functions and performance. 2008 The Japan Society of Applied Physics.

authors

• Kuo, Yue

published proceedings

• JAPANESE JOURNAL OF APPLIED PHYSICS

author list (cited authors)

• Kuo, Y.

citation count

• 46

complete list of authors

• Kuo, Yue

publication date

• March 2008

publisher

• IOP Publishing  Publisher

published in

• Japanese Journal of Applied Physics  Journal

keywords

• Tfts
• Thin-film Transistors
• Ulsics
• Ultra-large Scale Integrated Circuits

Digital Object Identifier (DOI)

• 10.1143/JJAP.47.1845

start page

• 1845

end page

• 1852

volume

• 47

issue

• 3

URL

• http%3A%2F%2Fdx.doi.org%2F10.1143%2Fjjap.47.1845