ON THE DETERMINATION OF CARBON AND OXYGEN IMPURITIES IN SILICON BY HE-3 ACTIVATION-ANALYSIS
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Carbon and oxygen impurities in silicon have been determined by 7.00 MeV3He activation analysis. The detection limits obtained for interference-free conditions are 0.1 ppb (wt) for carbon and 1.0 ppb (wt) for oxygen in silicon. 1984 Akadmiai Kiad.