Layer-by-layer characterization of ultrathin films with secondary ion mass spectrometry Conference Paper uri icon


  • We demonstrate the capability of cluster secondary ion mass spectrometry on characterization of multi-layer ultrathin films assembled by electrostatic adsorption of oppositely charged polyelectrolytes. The samples consisting of layers of polyethylenimine, PEI, and polystyrene sulfonate, PSS, were bombarded with 19keV (CsI)Cs + and 21keV Au 3+ projectiles with secondary ions identified by time-of-flight mass spectrometry. The data show the high sensitivity of cluster SIMS to the physico-chemical characteristics of the two topmost layers. 2004 Elsevier B.V. All rights reserved.

published proceedings


author list (cited authors)

  • Li, Z., Rickman, R. D., Verkhoturov, S. V., & Schweikert, E. A.

citation count

  • 8

complete list of authors

  • Li, Z||Rickman, RD||Verkhoturov, SV||Schweikert, EA

publication date

  • June 2004