Variable reflectivity mirrors with all profiled layers
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abstract
The paper describes the design and realization of variable reflectivity mirrors (VRM). A deposition model which considers the mask aperture as an extended source with a cosx() angular distribution was used in order to obtain the radial thickness profile. For a certain multilayer system, deposited with a fixed mask, a map relating the reflectance profile parameters to the deposition geometry was calculated. The experimental results are also presented.