Ozkeskin, Fatih Mert (2008-08). Feedback Controlled High Frequency Electrochemical Micromachining. Master's Thesis. Thesis uri icon

abstract

  • Microsystem and integrated circuitry components are mostly manufactured using semiconductor technologies. Fabrication using high strength metals, for demanding aerospace, mechanical, or biomedical applications, requires novel technologies which are different from those for silicon. A promising mass production method for micro/meso scale components is electrochemical micromachining. The complex system, however, requires high precision mechanical fixtures and sophisticated instrumentation for proper process control. This study presents an electrochemical micromachining system with a closed-loop feedback control programmed using a conditional binary logic approach. The closed-loop control is realized using electrical current as the dynamic feedback signal. The control system improves material removal rate by 250% through optimizing inter electrode gap and provides robust automation reducing machining variation by 88%. The new system evokes production of higher quality microcomponents. Workpiece damage is reduced by 97% and increased feature sharpness is observed.
  • Microsystem and integrated circuitry components are mostly manufactured using
    semiconductor technologies. Fabrication using high strength metals, for demanding
    aerospace, mechanical, or biomedical applications, requires novel technologies which
    are different from those for silicon. A promising mass production method for
    micro/meso scale components is electrochemical micromachining.
    The complex system, however, requires high precision mechanical fixtures and
    sophisticated instrumentation for proper process control. This study presents an
    electrochemical micromachining system with a closed-loop feedback control
    programmed using a conditional binary logic approach.
    The closed-loop control is realized using electrical current as the dynamic
    feedback signal. The control system improves material removal rate by 250% through
    optimizing inter electrode gap and provides robust automation reducing machining
    variation by 88%. The new system evokes production of higher quality
    microcomponents. Workpiece damage is reduced by 97% and increased feature
    sharpness is observed.

publication date

  • August 2008