Cathode target mounting for cathodic arc cathodes Patent uri icon

abstract

  • An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target and a target holder. In the preferred embodiment, a conductive interlayer is located between the cathode target and the target holder, and a cooling block is in contact with the cathode target.

author list (cited authors)

  • Weaver, S. A., Lipkin, D. M., Corderman, R. R., & Cooper, T. C.

complete list of authors

  • Weaver, SA||Lipkin, DM||Corderman, RR||Cooper, TC

publication date

  • August 2003