Carbon-enhanced fluoride ion cleaning Patent uri icon

abstract

  • A method and system for cleaning a metal article. The system is used to employ a method that comprises placing the article in a means defining a chamber; subjecting the article to a gaseous atmosphere in the means defining a chamber, where the gaseous atmosphere consisting essentially of carbon, hydrogen, and fluorine; and subjecting the article to the gaseous atmosphere at a temperature in a range from about 815 C. to about 1100 C. to clean the article.

author list (cited authors)

  • Lipkin, D. M., Rasch, L. T., & Meschter, P. J.

complete list of authors

  • Lipkin, Don M||Rasch, LT||Meschter, PJ

publication date

  • March 2003