Cooling system for cathodic arc cathodes Patent uri icon

abstract

  • An apparatus for cathodic arc coating is provided. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target connected to the power supply. The cathode target has a channeled back surface for improving heat transfer from the cathode target. In the preferred embodiment, the cathode target also includes a conductor segment connecting the cathode target to the power supply of the cathodic arc coating apparatus for conducting the increased current capacity of the cathode target and a cooling block in contact with the cathode target to further improve the heat transfer from the cathode target.

author list (cited authors)

  • Weaver, S. A., Lipkin, D. M., & Corderman, R. R.

complete list of authors

  • Weaver, SA||Lipkin, DM||Corderman, RR

publication date

  • June 2002