Micromachined tunable bandstop filters for wireless sensor networks
Conference Paper
Overview
Additional Document Info
View All
Overview
abstract
A MEMS based tunable bandstop filter is proposed for the wireless sensor networks. A tunable band-stop filter (BSF) has been designed with flat response at a selected frequency by incorporating microelectromechanical systems (MEMS) bridges. An equivalent circuit model for the tunable bandstop filter is derived and its parameters are extracted by using commercial software. High resistivity silicon substrate and MEMS surface micromachining process are employed. The measurement results for the tunable band stop filter reveals a tuning range from 19 GHz to 17.3 GHz. Additionally, low-pass-band insertion loss is found to be 1.3-2.4 db.