Wafer particle inspection technique using computer vision based on a color space transform model Academic Article

authors

• Lee, Chabum

published proceedings

• INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

author list (cited authors)

• Chun, H., Wang, J., Kim, J., & Lee, C.

complete list of authors

• Chun, Heebum||Wang, Jingyan||Kim, Jungsub||Lee, ChaBum

publication date

• August 2023

publisher

• Springer Nature  Publisher

published in

• The International Journal of Advanced Manufacturing Technology  Journal

keywords

• Color Space Transform
• Hue-saturation-value (hsv)
• Particle Inspection
• Wafer Metrology And Inspection

Digital Object Identifier (DOI)

• 10.1007/s00170-023-11888-y

start page

• 5063

end page

• 5071

volume

• 127

issue

• 11-12

URL

• http://dx.doi.org/10.1007/s00170-023-11888-y