Electrocoagulation for removal of silica nano-particles from chemical-mechanical-planarization wastewater
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COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
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Research
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Chemical-mechanical-planarization
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Cmp Wastewater Treatment
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Electrochemical
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Electrocoagulation
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Monopolar
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Parallel Plate
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Silica Colloids
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http://dx.doi.org/10.1016/j.colsurfa.2004.11.026