Short time deposition kinetics of diethyl phthalate and dibutyl phthalate on a silicon wafer surface Academic Article

authors

• Den, Walter

published proceedings

• INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH

author list (cited authors)

• Kang, Y. H., Den, W., & Bai, H. L.

citation count

• 21

complete list of authors

• Kang, YH||Den, W||Bai, HL

publication date

• February 2006

publisher

• American Chemical Society (ACS)  Publisher

published in

• Industrial & Engineering Chemistry Research  Journal

keywords

• 40 Engineering

Digital Object Identifier (DOI)

• 10.1021/ie050754s

start page

• 1331

end page

• 1336

volume

• 45

issue

• 4

URL

• http://dx.doi.org/10.1021/ie050754s