Short time deposition kinetics of diethyl phthalate and dibutyl phthalate on a silicon wafer surface Academic Article uri icon

published proceedings

  • INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH

author list (cited authors)

  • Kang, Y. H., Den, W., & Bai, H. L.

complete list of authors

  • Kang, YH||Den, W||Bai, HL

publication date

  • February 2006