Deposition and electrostatic removal of gaseous organic contaminants on substrate surfaces Academic Article uri icon

published proceedings

  • APPLIED SURFACE SCIENCE

author list (cited authors)

  • Shiue, A., Tien, D., Den, W., Hu, S., & Hsu, C.

complete list of authors

  • Shiue, Angus||Tien, Der-Chi||Den, Walter||Hu, Shih-Cheng||Hsu, Chia-Shao

publication date

  • August 2010