Deposition and electrostatic removal of gaseous organic contaminants on substrate surfaces Academic Article

authors

• Den, Walter

published proceedings

• APPLIED SURFACE SCIENCE

author list (cited authors)

• Shiue, A., Tien, D., Den, W., Hu, S., & Hsu, C.

citation count

• 2

complete list of authors

• Shiue, Angus||Tien, Der-Chi||Den, Walter||Hu, Shih-Cheng||Hsu, Chia-Shao

publication date

• August 2010

publisher

• Elsevier  Publisher

published in

• Applied Surface Science  Journal

keywords

• Airborne Molecular Contamination
• Dbp
• Electrostatic Force
• Uv Spectrophotometer

Digital Object Identifier (DOI)

• 10.1016/j.apsusc.2010.03.128

start page

• 6113

end page

• 6116

volume

• 256

issue

• 20

URL

• http://dx.doi.org/10.1016/j.apsusc.2010.03.128