Modeling, fabrication, and readout of compact optomechanical accelerometers Conference Paper

name of conference

• MOEMS and Miniaturized Systems XXII

authors

• Guzman, Felipe

published proceedings

• Proceedings of SPIE

author list (cited authors)

• Martinez, B. B., Nelson, A., Hines, A., Mock, J. P., Valds, G., Sanjuan, J., & Guzmn, F.

citation count

• 0

complete list of authors

• Martinez, Brina B||Nelson, Andrea||Hines, Adam||Mock, Jonathan P||Valdés, Guillermo||Sanjuan, Jose||Guzmán, Felipe

editor list (cited editors)

• Piyawattanametha, W., Park, Y., & Zappe, H.

publication date

• March 2023

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• 51 Physical Sciences
• 5108 Quantum Physics

Digital Object Identifier (DOI)

• 10.1117/12.2655490

start page

• 1243404-1243404-9

volume

• 12434

URL

• http://dx.doi.org/10.1117/12.2655490