On Uses of Noise Analysis for the Uncertainty Quantification of Line Edge Roughness Estimation Academic Article

authors

• Savari, Serap

published proceedings

• IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

author list (cited authors)

• Akpabio, I. I., & Savari, S. A.

citation count

• 0

complete list of authors

• Akpabio, Inimfon I||Savari, Serap A

publication date

• August 2023

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• Index Terms-conformal Prediction
• Line Edge Roughness
• Machine Learning
• Quantile Regression
• Uncertainty Quantification

Digital Object Identifier (DOI)

• 10.1109/TSM.2023.3270230

start page

• 319

end page

• 326

volume

• 36

issue

• 3

URL

• http://dx.doi.org/10.1109/tsm.2023.3270230