First-principles insights into Cs/NF₃ co-activation effects on near-infrared In_0.53Ga_0.47As (001) surface

authors

• Xu, Shiqing

published proceedings

• MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

author list (cited authors)

• Fang, Q., Shen, Y., Zhang, S., Yang, X., Chen, L., & Xu, S.

citation count

• 4

complete list of authors

• Fang, Qianglong||Shen, Yang||Zhang, Shuqin||Yang, Xiaodong||Chen, Liang||Xu, Shiqing

publication date

• June 2022

publisher

• Elsevier  Publisher

published in

• Materials Science in Semiconductor Processing  Journal

keywords

• Cs/nf3
• Density Functional Theory
• Electron Affinity
• In0.53ga0.47as
• New Dipole

Digital Object Identifier (DOI)

• 10.1016/j.mssp.2022.106575

start page

• 106575

end page

• 106575

volume

• 144

URL

• http://dx.doi.org/10.1016/j.mssp.2022.106575