Velocity regulation limits in a precision two-dimensional magnetic levitator
A magnetically levitated stage is a promising solution to higher resolution systems. In view of this, a test-bed has been developed to demonstrate the principles of novel levitation linear motors. This article discusses the analysis, simulation and experimental results on position fluctuation due to force ripple in a two-dimensional magnetic levitator.
author list (cited authors)
Kim, W. J., & Trumper, D. L.