Velocity regulation limits in a precision two-dimensional magnetic levitator Conference Paper uri icon

abstract

  • A magnetically levitated stage is a promising solution to higher resolution systems. In view of this, a test-bed has been developed to demonstrate the principles of novel levitation linear motors. This article discusses the analysis, simulation and experimental results on position fluctuation due to force ripple in a two-dimensional magnetic levitator.

author list (cited authors)

  • Kim, W. J., & Trumper, D. L.

publication date

  • December 1999