Six-Axis Nano-Positioning with Planar Magnetic Levitation
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© 2001 IEEE. Nanoscale science and engineering is an emerging technological field and has immense economic and societal impacts. This paper presents a highprecision magnetic levitation (maglev) technology that can be used in many crucial research activities in nanotechnology and other precision applications dealing with delicate motions and forces. They include manufacture of nanoscale structures, atomic-level manipulation, assembly and packaging of microparts, vibration isolation for instrumentation, and seismic motion detection. A compact, lightweight, single-moving part that holds the specimen can be magnetically levitated in all six degrees of freedom. We have demonstrated the applicability of this maglev technology in nanoscale science and engineering.
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