STUDY ON THE INFLUENCE OF CONTACT GLUE LAYER GROWTH CONDITION ON THE QUALITY OF GAP FILL TUNGSTEN LAYER Conference Paper uri icon

published proceedings

  • 2016 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC)

author list (cited authors)

  • Liu, J., Wu, H., Zhang, X., Wang, Y. i., Lu, Z., & Tian, C.

complete list of authors

  • Liu, Jianqiang||Wu, Hanming||Zhang, Xing||Wang, Yi||Lu, Zhizhong||Tian, Chao

publication date

  • 2016