STUDY ON THE INFLUENCE OF CONTACT GLUE LAYER GROWTH CONDITION ON THE QUALITY OF GAP FILL TUNGSTEN LAYER Conference Paper
- Overview
Overview
published proceedings
- 2016 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC)
author list (cited authors)
- Liu, J., Wu, H., Zhang, X., Wang, Y. i., Lu, Z., & Tian, C.
complete list of authors
- Liu, Jianqiang||Wu, Hanming||Zhang, Xing||Wang, Yi||Lu, Zhizhong||Tian, Chao
publication date
- 2016