TOP METAL LAYER ELECTRO PLATING EDGE BEVEL REMOVAL IMPROVEMENT STUDY Conference Paper uri icon

published proceedings

  • 2016 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC)

author list (cited authors)

  • Liu, J., Wu, H., Zhang, X., Wang, Y. i., Tian, C., & Sun, L.

complete list of authors

  • Liu, Jianqiang||Wu, Hanming||Zhang, Xing||Wang, Yi||Tian, Chao||Sun, Liang

publication date

  • 2016