Microstructure and electronic properties of Cu/Mo multilayers and three-dimensional arrays of nanocrystalline Cu precipitates embedded in a Mo matrix Academic Article uri icon

abstract

  • Three-dimensional arrays of nanocrystalline Cu precipitates embedded in a Mo matrix were synthesized and microstructure and electronic properties of Cu/Mo multilayers were examined. For the experiment Cu/Mo multilayers were dc sputter deposited at room temperature onto Si substrates with a 50 nm SiO2buffer layer. It was found that the Cu layers exhibit a body centred cubic (bcc) structure and the interface between Cu and Mo remains sharp and planner in all specimens. It was also found that annealing of Cu/Mo multilayers, under carefully controlled temperature and time conditions will form 3D Cu nanoparticles with bcc structure lying along the interfaces.

author list (cited authors)

  • Zhang, X., Hundley, M. F., Malinowski, A., Misra, A., Wang, H., & Nastasi, M.

citation count

  • 6

publication date

  • April 2004