Microstructure and electronic properties of Cu/Mo multilayers and three-dimensional arrays of nanocrystalline Cu precipitates embedded in a Mo matrix
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Three-dimensional arrays of nanocrystalline Cu precipitates embedded in a Mo matrix were synthesized and microstructure and electronic properties of Cu/Mo multilayers were examined. For the experiment Cu/Mo multilayers were dc sputter deposited at room temperature onto Si substrates with a 50 nm SiO2buffer layer. It was found that the Cu layers exhibit a body centred cubic (bcc) structure and the interface between Cu and Mo remains sharp and planner in all specimens. It was also found that annealing of Cu/Mo multilayers, under carefully controlled temperature and time conditions will form 3D Cu nanoparticles with bcc structure lying along the interfaces.
author list (cited authors)
Zhang, X., Hundley, M. F., Malinowski, A., Misra, A., Wang, H., & Nastasi, M.