Critical factors that determine fcc to bcc phase transformation in sputter deposited austenitic stainless steel films Conference Paper uri icon

abstract

  • Bulk austenitic stainless steels (SS) have face centered cubic (fee) structure. However, sputter deposited films synthesized using austenitic stainless steel targets usually exhibit body centered cubic (bcc) structure or a mixture of fcc and bcc phases. This paper presents studies on the effect of processing parameters on the phase stability of 304 and 330 SS thin films. 304 SS thin films with in-plane, biaxial residual stresses in the range of 1 GPa (tensile) to 300 MPa (compressive) exhibited only bcc structure. The retention of bcc 304 SS after high temperature annealing followed by slow furnace cooling indicates depletion of Ni in as-sputtered 304 SS films. 330 SS films sputtered at room temperature possess pure fcc phase. The Ni content and the substrate temperature during deposition are crucial factors in determining the phase stability in sputter deposited austenitic SS films.

published proceedings

  • MPMD Fifth Global Innovations Proceedings, Surfaces and Interfaces in Nanostructured Materials and Trends in LIGA, Miniaturization, and Nanoscale Materials

author list (cited authors)

  • Zhang, X., Misra, A., Schulze, R., Wang, H., Wetteland, C. J., & Nastasi, M.

complete list of authors

  • Zhang, X||Misra, A||Schulze, R||Wang, H||Wetteland, CJ||Nastasi, M

publication date

  • July 2004