Chemical solution deposition of epitaxial carbide films. Academic Article

abstract

• Carbide films exhibit many unique properties. The development of a versatile and simple technique for the deposition of carbide films will enable a wide range of technological applications. Here we report a cost-effective chemical solution deposition or polymer-assisted deposition method for growing epitaxial carbide (including TiC, VC, and TaC) films. These epitaxial carbide films exhibit structural and physical properties similar to the films grown by vapor deposition methods.

authors

• Nastasi, Michael

published proceedings

• J Am Chem Soc

author list (cited authors)

• Zou, G., Wang, H., Mara, N., Luo, H., Li, N., Di, Z., ... Jia, Q.

citation count

• 36

complete list of authors

• Zou, Guifu||Wang, Haiyan||Mara, Nathan||Luo, Hongmei||Li, Nan||Di, Zengfeng||Bauer, Eve||Wang, Yongqiang||McCleskey, Thomas||Burrell, Anthony||Zhang, Xinghang||Nastasi, Michael||Jia, Quanxi

publication date

• March 2010

publisher

• American Chemical Society (ACS)  Publisher

published in

• Journal of the American Chemical Society  Journal

keywords

• 0306 Physical Chemistry (incl. Structural)
• 0912 Materials Engineering

PubMed Central ID

• 20136140

Digital Object Identifier (DOI)

• 10.1021/ja9102315

start page

• 2516

end page

• 2517

volume

• 132

issue

• 8

URL

• http://dx.doi.org/10.1021/ja9102315